The Process Steps of Sputter Coating Machine for Depositing Metal thin Films

2024.12.31

Author：sputter coating machine

The process steps of sputter coating machine for depositing metal thin films usually include the following key stages:

1、 Preparation stage

Select target material and substrate: Choose the appropriate metal target material based on the required type of metal film. Choose a suitable substrate material to ensure good adhesion between it and the metal film.

Cleaning and treatment: Thoroughly clean the target material and substrate to remove impurities such as dirt, grease, and oxides on the surface. After cleaning, perform necessary pre-treatment on the substrate, such as polishing, etching, etc., to improve its surface quality and adhesion.

2、 Vacuum processing stage

Vacuum pumping: The interior of the sputter coating machine's working chamber is evacuated to a high vacuum state to avoid the influence of gas molecules on the metal film. Usually, a certain degree of vacuum, such as 10-6Pa, is required to ensure the stability of the sputter process and the quality of the film.

3、 Coating stage

Loading target and substrate: Place the cleaned and processed target and substrate in the designated position of the sputter coating machine. Adjust the angle and distance between the target material and the substrate to ensure that the sputtered metal atoms can be uniformly deposited on the surface of the substrate.

Activate ion source: By bombarding the surface of the target material with a high-energy ion beam, its atoms or molecules evaporate and deposit on the substrate surface. During the sputter process, it is necessary to control the power, voltage, and other parameters of the ion source to regulate the sputter and deposition rates of metal atoms.

Control process parameters: During the sputter coating process, it is necessary to accurately control multiple process parameters, including sputtering power, gas pressure (usually the pressure of inert gases such as argon), substrate temperature, etc. These parameters have a significant impact on the structure and properties of metal thin films, and therefore need to be optimized and adjusted according to actual needs.

4、 End stage

Stop ion source: Stop the operation of the ion source when the required coating thickness or time is reached.

Remove the substrate: Carefully remove the plated metal film substrate from the sputter coating machine.

Post processing and testing: Perform necessary post-processing on the plated metal film, such as cleaning, drying, etc. Use appropriate testing methods to detect and evaluate the quality and performance of metal thin films, such as characterization and analysis using scanning electron microscopy (SEM), X-ray diffraction (XRD), and other instruments.

In summary, the process steps of sputter coating machine for depositing metal thin films include multiple key steps such as preparation stage, vacuum treatment stage, coating stage, and completion stage. Each step requires precise control of multiple parameters and conditions to ensure that the resulting metal film has excellent quality and performance.

Qingdao Chenan Machinery Co., Ltd. has the advantage of developing and producing rubber winding equipment, with higher technology than various equipment assembly manufacturers in the industry. For more information about sputter coating machine, please contact us.

Company: Qingdao Chenan Machinery Co., Ltd.

Address: Yanjialing Industrial Park, East Chengma Road, Tongji New Economic Zone, Jimo District, Qingdao City, Shandong Province

Email: qdcajx@gmail.com